![]() Sentaurus Mesh is a modular Delauney mesh generator of discretisation grids for complex two- and three-dimensional devices. ![]() Command to run Sentaurus Structure Editor: sde It employs a graphical user interface (GUI), and is script-able. Sentaurus Structure Editor is a two- and three-dimensional device editor, and three-dimensional process emulator. Command to run Sentaurus Interconnect: sinterconnect Sentaurus Interconnect is an advanced one-, two- and three-dimensional simulator suitable for IC interconnect reliability analysis. Note: This CAD module has been added to our Synopsys bundle for 2022. Sentaurus Topography 3D is a three-dimensional simulator for evaluating and optimising critical topography-processing steps, such as etching and deposition. This viewer displays and allows editing of process mask information such that it can be used in Sentaurus Process and Sentaurus Interconnect. Command to run Sentaurus Process: sprocess for the partial full and sequential modelling of a complete I.C. In this module, users may add ion implantation steps, diffusion species, annealing steps, etc. Sentaurus Process is a process modeling/simulation environment. It is used to design, organise, and run simulations. Sentaurus Workbench is the graphical front end that integrates TCAD Sentaurus simulation tools into one environment. Directions for locating the tutorial on the disk are given at the end of the table. ![]() Module descriptions have been taken from the HTML front page of the tutorial introduction. ![]() For the complete list, and to run the tutorials, see the original document on our LINUX STC disk. They are designed specifically for new users, and provide work-able examples and exercises. The table below lists most of the introductory training modules for this suite. ![]() We have received a number of requests to provide training and examples for the TCAD Sentaurus CAD suite. ![]()
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December 2022
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